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PSX307/PSX307A Plasma Cleaner

NM-EFP1A/NM-EFP3A

Product details

The PSX307 Plasma Cleaner’s parallel plate chamber technology delivers superior etch uniformity over conventional batch systems. Experience surface cleaning before wirebond or flip-chip attach and surface activation and improved underfill wettability and mold encapsulation.

The PSX307A variant supports both wafer-level processes and traditional substrate device-level processes. Surface modification of wafer before Insulation Layer, after Redistribution Layer, ball attach or after dicing to improve the die attach process.

Key features

  • Parallel plate technology enabling uniformity
  • Substrate or 300mm Wafer, with or without dicing frame
  • Patented Plasma Monitor (real-time)
  • Unit level process traceability
  • Argon, Oxygen or mixed process gas options

Specification Description
Model ID PSX307
Model No. NM-EFP1A
Cleaning Method Parallel plate RF back-sputtering method
Gas for Electrical Discharge * Ar [option : O2]
[*1]
Substrate Dimensions (mm) * L 50 x W 20 to L 250 x W 75 [*2] incl. S type option
L 50 x W 20 to L 330 x W 120 incl. M type option
Substrate Thickness (mm) 0.5 to 2.0
Dimensions (mm) / Mass * W 930 x D 1,100 x H 1,450 / 555 kg
W 1,764 x D 1,100 x H 1,450 / 850 kg incl. S type option
W 1,764 x D 1,100 x H 1,450 / 770 kg incl. M type option
[*3]
Power Source * 1-phase AC 200 V, 2.00 kVA [Full Load 5.00 kVA]
[*4]
Pneumatic Source 0.49 MPa or more, 6.5 L/min [A.N.R.]
Model ID PSX307A
Model No. NM-EFP3A
Cleaning Method Parallel plate RF back-sputtering method
Gas for Electrical Discharge Ar [Option : O2, O2 + He]
Power Source 1-phase AC 200 / 208 / 220 / 230 / 240 ± 10 V, 50 / 60 Hz , 6.00 kVA
Pneumatic Source 0.49 MPa, 50 L/min[A.N.R]
Dimensions (mm) W 900 × D 1,150 × H 1,650
Mass 630 kg
"(Footnotes)
[*1]: If the optional oxygen gas is selected as a discharge gas, nitrogen gas is also required to dilute exhaust
[*2]: For W 70.1mm to W 75mm, the electrode in the chamber is required separately
[*3]: Tolerance of equipment dimensions is ±5mm, Touch panel and condition lamp is not included. Mass varies depending on configuration
[*4]: Compatible with 1-phase 208/220/230/240 V